Rapid and high-precision 3D surface inspection are uniquely combined thanks to a high speed camera system and Nikon’s newly developed fringe cycle method software in the BW-H501. Surface profiling is now possible in as little as 200ms for a height of 40µm.
BW-H501 outputs and displays real-time height images at 5 fps. A heating
stage allows observation and analysis of the deformation process of
film and gel samples in real time. And, with high precision measurement
of 10nm using white light interferometry, it is now possible to analyze
and evaluate the surface roughness of objects.
Observation and analysis of optically diffusive surfaces, a weakness of
conventional optical systems, presents no difficulty. The profiler can
be used to evaluate the surface of ceramic coated film and diffuser
plates.
With the fringe cycle method, the coordinate value on the Z-axis with
the maximum local focus measure is taken as the height of each pixel.
Generating an interference fringe on the surface of the object with a
two beam interference objective lens generates a very high focus
measure, achieving effective height resolution of 100 nm and repeatable
precision of σ = 10 nm, delivering height image capture with
high-precision.
The BWH-501's X-Cycle Imager combines a piezo actuator with a high-speed
camera for unique high-speed image capture. Image capture of 900 fps is
possible with output and display of real-time height images at 5 fps.
Captured height images undergo accumulative addition with suppressed
random noise components. Real-time extended depth of focus (EDF) images
may be output or displayed as a freeze-frame image. Real-time height
images may also be output or displayed with pseudocolors.
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