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High-Precision White Light Interferometer

  • Manufactured by: Micro-Epsilon

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Product Description:

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.


  • Absolute distance measurement with nanometer accuracy
  • Distance-independent thickness measurements
  • Best-in-Class: Resolution < 30 picometers (IMS5600-DS)
  • High signal stability due to new evaluation algorithms and active temperature compensation
  • Large offset distance
  • Simple parameter set up via web interface
  • Industry optimized sensors with robust metal housing and flexible cables
  • Sensors and cables suitable for vacuum


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